HYESUNG Tech Co., Ltd. is a total service provider for TMP controller repair and vacuum pump repair that repairs almost all the major global brands of TMP controller and vacuum pump products.
HYESUNGTech sets focus on professional maintenance and repair service for TMP controller and vacuum pumps, especially the most major kinds of TMP products. It is providing direct service for TMP controller repair by its highly experienced in-house craftsmanship.
In addition, HYESUNG Tech is managing the TMP business of most major kinds of refurbished turbo pump for the semiconductor equipment.
Now HYESUNG Tech is strategically expanding its sales business to provide integration of the support to customers, so that HYESUNG Tech’s sales have more than doubled in the past two years. At the same time, with innovative technology and skilled man power, HYESUNG Tech made efforts to explore overseas markets for a greater leap to set up overseas branches in Singapore and Malaysia.
That is why HYESUNG Tech has enhanced its position as the leading customer service provider in TMP maintenance and repair industry which provides real-time updates from inquiry, diagnostic and the complete repair service.
HYESUNGTECH dealing with the major products of TMP Controller for maintenance and repair:
RF Generator:
- AE MDX SPARC-LE HR CHOPPER, AE PEI’ 10K RF GENERATOR, AE REG1250, AE RFG2000 2V, AE RFG3000, AE RFG3001, AE ASPECT5013, AE RFXI15500, AE RFG3000, AE RFG3001
- ENI OEM12A RF GENERATOR, ENI OEM25B RF GENERATOR, ENI GHW-50 SERIES RE GENERATOR, ENI ACG SERIES RF GENERATOR
- KYOSAN RF GENERATOR RFK3OZCPS1 3KW, JFKSOZD TE2 5KW, RFK100ZD WT1, KYOSAN MATCHING BOX
- AD-TEC RF PLASMA GENERATOR AX-100011, AXS000W, AX-20000111, AX-10000W AKT, AX-15000W AKT
- HUTTINGER RF GENERATOR 1.6KW
- RFPP LF-5
- COMDEL CLF5000
- MBK50-P52 RE GENERATOR AUTO MATCHING BOX
Power Supply:
- MKN-152-3S4-PS MICROWAVE, PFEIFFER TCPO40, OMRON BH100PCW, METAL HALIDE LAMP, APPLIED MATERIALS 24V DC, FUSION LIGHT HAMMER UV, FUSION P300MQ,
AE PINNACLE 8/15KW, AE PINNACLE 10/12KW, AE MDX L-12M, UV POWER SUPPLY, KYOSAN HPK15 DC, HV LAMP, BERTAN HIGH VOLTAGE POWER SUPPLY, GUSTAV KLEIN, DELTRON, SIEMENS, PLUS POWER SUPPLY SL10
Vacuum Gauge:
- IMR265, TPR265, PKR251, IKR251, MPG400
- TPG262 GAUGE CONTROLLER, TPG300 GAUGE CONTROLLER,IMG300 GAUGE CONTROLLER
Helium Leak Detector:
- ULVAC HELIUM LEAK DETECTOR
- HELEN HELIUM LEAK DETECTOR
- PFEIFFER HELIUM LEAK DETECTOR
- ADIXEN(ALCATEL) HELIUM LEAK DETECTOR
- LEYBOLD HELIUM LEAK DETECTOR
Flow Controller:
- ENTEGRIS FLOW CONTROLLER, MALEMA FLOW CONTROLLER, BROOKS(CELERITY) FLOW CONTROLLER, PARKER FLOW CONTROLLER and HORIBA FLOW CONTROLLER
